I-Aluminiyam ye-Nitride I-Crucible ALN I-Aluminiyam ye-Aluminiyam
Ukunikezelwa kweMveliso
I-AlN Idityaniswe ngokuncitshiswa kwe-thermal ye-alumina okanye nge-nitride ngqo ye-alumina.Inoxinano lwe-3.26 eBhalisiweyo kwaye iKhuselwe yi-MarkMonitor-3, nangona inganyibiliki, ibola ngaphezu kwe-2500 °C emoyeni.Izinto eziphathekayo ziboshwe ngokudibeneyo kwaye zixhathisa i-sintering ngaphandle koncedo lwesongezo esenza ulwelo.Ngokuqhelekileyo, iioksidi ezifana ne-Y 2 O 3 okanye i-CaO zivumela ukufikelela kwi-sintering kumaqondo obushushu aphakathi kwe-1600 kunye ne-1900 °C.
I-Aluminiyam nitride yimathiriyeli ye-ceramic esebenza ngokugqwesileyo, kwaye uphando lwayo lunokulandelelwa emva kweminyaka engaphezu kwekhulu eyadlulayo.Iqulunqwe nguF. Birgeler kunye no-A. Geuhter Ifunyenwe kwi-1862, kwaye ngo-1877 yi-JW MalletS I-Aluminium nitride yenziwe okokuqala ngqa, kodwa ayizange isebenziseke iminyaka engaphezu kwe-100, xa yayisetyenziswa njengesichumisi sekhemikhali. .
Ngenxa yokuba i-aluminiyam nitride iyikhompawundi edibeneyo, ene-coefficient encinci yokuzabalaza kunye nendawo ephezulu yokunyibilika, kunzima ukuntywila.Kwakungekho kwada kwayi-1950 ukuba i-aluminium nitride ceramics yaveliswa ngempumelelo okokuqala kwaye isetyenziswe njengento ephikisayo ekunyibilikeni kwentsimbi ecocekileyo, i-aluminium kunye ne-aluminium alloy.Ukususela ngo-1970, kunye nokujula kophando, inkqubo yokulungiselela i-aluminium nitride iye yakhula ngokukhula, kwaye umthamo wayo wesicelo uye wanda.Ingakumbi ukusukela ekungeneni kwenkulungwane yama-21, kunye nophuhliso olukhawulezayo lwetekhnoloji ye-microelectronics, umatshini we-elektroniki kunye nezixhobo ze-elektroniki ezibhekiselele kwi-miniaturization, ilula, ukudibanisa, kunye nokuthembeka okuphezulu kunye nolwalathiso oluphezulu lokuphuma kwamandla, ngakumbi nangakumbi izixhobo ezintsonkothileyo ze-substrate kunye nezinto zokupakisha zokulahla ubushushu. phambili iimfuno eziphezulu, ngakumbi ukukhuthaza uphuhliso olunamandla loshishino lwe-aluminiyam nitride.
Iimpawu eziphambili
AlN Ukuxhathisa ukhukuliseko lwezinyithi ezininzi ezityhidiweyo, ngakumbi i-aluminiyam, i-lithium kunye nobhedu.
Iyakwazi ukumelana nokukhukuliseka okuninzi kwetyuwa etyhidiweyo, kuquka i-chlorides kunye ne-cryolite
I-thermal conductivity ephezulu yezinto ze-ceramic (emva kwe-beryllium oxide)
Ukumelana nomthamo ophezulu
Amandla aphezulu e-dielectric
Ichithwa yi-asidi kunye ne-alkali
Kwifom yomgubo, i-hydrolyzed ngokulula ngamanzi okanye ukufuma
Isicelo esingundoqo
1, usetyenziso lwesixhobo sepiezoelectric
I-Aluminium nitride ine-resistiveivity ephezulu, i-thermal conductivity ephezulu (i-8-10 amaxesha e-Al2O3), kunye ne-coefficient yokwandisa ephantsi efana ne-silicon, eyona nto ifanelekileyo yokushisa okuphezulu kunye nezixhobo zombane zamandla aphezulu.
2, imathiriyeli yokupakishwa kwe-elektroniki
Izinto ezisetyenziswa ngokuqhelekileyo ze-ceramic substrate ziyi-beryllium oxide, i-alumina, i-aluminium nitride, njl., apho i-alumina ceramic substrate ine-conductivity ephantsi ye-thermal, i-coefficient yokwandisa i-thermal ayihambelani ne-silicon;nangona i-beryllium oxide ineempawu ezibalaseleyo, kodwa umgubo wayo unetyhefu kakhulu.
Phakathi kwezinto ezikhoyo ze-ceramic ezinokuthi zisetyenziswe njengezixhobo ze-substrate, i-silicon nitride ceramic inamandla okugoba aphezulu, ukuxhathisa okulungileyo kokunxiba, yimathiriyeli ye-ceramic esebenza kakuhle ngoomatshini, kunye neyona nto incinci yokwandisa i-thermal coefficient.I-aluminiyam i-nitride ceramics ine-conductivity ephezulu ye-thermal, ukuxhathisa okulungileyo kwe-thermal, kwaye iseneempawu ezilungileyo zoomatshini kubushushu obuphezulu.Ngokubhekiselele ekusebenzeni, i-aluminiyam nitride kunye ne-silicon nitride okwangoku zezona zixhobo zifanelekileyo kwii-substrates zokupakisha ze-elektroniki, kodwa nazo zinengxaki eqhelekileyo kukuba ixabiso liphezulu kakhulu.
3, kwaye isetyenziswe kwizinto ezikhanyayo
Ububanzi obukhulu be-gap ye-bandgap ye-aluminium nitride (i-AlN) yi-6.2 eV, ene-photoelectric conversion performance esebenzayo xa kuthelekiswa ne-indirect bandgap semiconductor.I-AlN Njengokukhanya okuluhlaza okubalulekileyo kunye nezinto ezikhupha ukukhanya kwe-UV, isetyenziswa kwi-UV / enzulu ye-UV ekhupha ukukhanya, i-UV laser diode kunye ne-UV detector.Ngaphezu koko, i-AlN inokwenza izisombululo eziqhubekayo eziqinileyo kunye neqela le-III le-nitrides ezifana ne-GaN kunye ne-InN, kunye ne-alloy yayo ye-ternary okanye ye-quaternary ingakwazi ukulungelelanisa ngokuqhubekayo i-gap yayo yebhendi ukusuka ebonakalayo ukuya kwi-ultraviolet bands enzulu, iyenza ibe yinto ebalulekileyo yokusebenza okuphezulu kwe-luminescent.
4, ezisetyenziswa kwi-substrate materials
Iikristale ze-AlN ziyinxalenye efanelekileyo ye-GaN, i-AlGaN kunye ne-AlN epitaxial materials.Xa kuthelekiswa nesafire okanye i-SiC substrate, i-AlN inomdlalo oshushu ngakumbi kunye ne-GaN, inokuhambelana kweekhemikhali eziphezulu, kunye noxinzelelo oluncinci phakathi kwe-substrate kunye ne-epitaxial layer.Ngoko ke, xa i-crystal ye-AlN isetyenziselwa i-GaN epitaxial substrate, inokunciphisa kakhulu ubuninzi besiphako kwisixhobo, iphucule ukusebenza kwesixhobo, kwaye inethemba elihle lokusetyenziswa ekulungiseleleni ukushisa okuphezulu, ukuphindaphinda okuphezulu kunye namandla aphezulu e-elektroniki. izixhobo.
Ukongezelela, i-AlGaN epitaxial material substrate kunye ne-AlN crystal njenge-aluminium ephezulu (i-Al) inxalenye inokunciphisa ngokufanelekileyo ubuninzi besiphako kwi-nitride epitaxial layer, kwaye iphucule kakhulu ukusebenza kunye nobomi benkonzo yesixhobo se-nitride semiconductor.Ii-detectors ezikumgangatho ophezulu wemihla ngemihla eziziimfama ezisekelwe kwi-AlGaN zisetyenziswe ngempumelelo.
I-5, isetyenziswe kwi-ceramics kunye nezixhobo ezichasayo
I-aluminiyam i-nitride ingasetyenziswa kwi-sintering ye-ceramics yesakhiwo, i-aluminiyam i-nitride ceramics elungiselelwe, kungekhona nje iipropati ezilungileyo zoomatshini, amandla okusonga angaphezulu kwe-Al2O3 kunye nee-ceramics ze-BeO, ubunzima obuphezulu, kodwa kunye nobushushu obuphezulu kunye nokuxhathisa umhlwa.Ukusebenzisa i-AlN ye-ceramic ukumelana nobushushu kunye nokumelana nomhlwa, ingasetyenziselwa ukwenza iindawo ezinobushushu obuphezulu obunganyangekiyo njenge-crucible kunye ne-Al evaporation plate.Ukongeza, iikheramics ezicocekileyo ze-AlN ziikristale ezicacileyo ezingenambala, ezineempawu ezintle zokukhanya, kwaye zinokusetyenziswa njengefestile ye-infrared yobushushu obuphezulu kunye nobushushu obunganyangekiyo bokugquma kwiiseramikhi ezicacileyo zokwenza izixhobo zombane zombane.
6. Imidibaniso
I-epoxy resin / i-AlN imathiriyeli ehlanganisiweyo, njengento yokupakisha, ifuna ukuhanjiswa kakuhle kwe-thermal kunye nokukwazi ukutshabalalisa ubushushu, kwaye le mfuno iya isanda.Njengesixhobo sepolymer esineempawu ezintle zeekhemikhali kunye nokuzinza komatshini, i-epoxy resin kulula ukuyinyanga, kunye nesantya esincinci sokunciphisa, kodwa ukuqhutyelwa kwe-thermal akuphezulu.Ngokongeza i-AlN nanoparticles ene-thermal conductivity egqwesileyo kwi-epoxy resin, ukuqhutyelwa kwe-thermal kunye namandla kunokuphuculwa ngokufanelekileyo.
