Amacandelo eVacuum yobushushu obuphezulu
Unyango lobushushu ikakhulu lubandakanya i-oxidation, i-diffusion kunye neenkqubo zokucoca.I-oxidation yinkqubo yokongeza apho ii-wafers ze-silicon zifakwe kwi-furnace yobushushu obuphezulu kwaye i-oksijini yongezwa ukuze isebenze kunye nabo yenze i-silica kumphezulu we-wafer.Ukusasazwa kukuhambisa izinto ukusuka kwindawo yoxinzelelo oluphezulu ukuya kwindawo yoxinzelelo oluphantsi ngokusebenzisa intshukumo yemolekyuli ye-thermal, kwaye inkqubo yokusasazwa ingasetyenziselwa ukwenza izinto ezithile zedoping kwi-silicon substrate, ngaloo ndlela itshintsha ukuhanjiswa kwe-semiconductors.
